The Osram HBO 201 W/HS-D2 is 200 Watt, mercury short arc double-ended lamp for semiconductor applications in TEL Mark 8 stepper(s).
Features
High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
Designed for long lasting performance
Qualified with TEL
Application
Semiconductor
Specifications
Abbrev. With Packaging Info.
HBO201WHSD2 / 69168
Application
Semiconductor
Average Rated Life (hr)
1000
Base
Special Double Ended
Base Anode
SFcX32-22
Base Cathode
SFcX12-4/15
Bulb
20/15
Class
C (gas)
Cooling
Convection
Current (A)
8
Diameter d (in)
0.787
Diameter d (mm)
20.00
Electrode Gap (cold) (mm)
2
Family Brand Name
HBO®
Lamp Finish
Clear
Length l1 (mm)
150
Length l1 max. (mm)
150
Length l2 (mm)
127
Length l2 max. (mm)
127
Maximum Base Temperature °C
230
Maximum Overall Length - MOL (mm)
150
Nominal Voltage (V)
25.00
Nominal Wattage (W)
201.00
Operating Position
Vertical, anode up
Reflector Coating
20.00
Type of Current
DC
Product Warning
Mercury Short Arc lamps emit harmful ULTRAVIOLET RADIATION, are under HIGH PRESSURE, require a HIGH VOLTAGE ignition, and can GENERATE OZONE (unless designated "OFR".) These lamps get VERY HOT during operation, and remain hot after operation for a significant time. Avoid direct or reflected exposure as this can cause serious skin burns and eye injury. This lamp should only be operated in properly designed and maintained equipment.
Warranty Information
Manufacturer's Warranty:
The manufacturer warrants its products to be free of detects in materials and workmanship for the stated period from date of original purchase invoice. All warranties or merchant ability and fitness for any purpose and all other warranties, expressed or implied, except those expressly set forth herein, are deemed waived and excluded. Manufacturer's duty under the warranty is limited to replacement and/or repair of the defective part at their exclusive option. Seller shall not be liable for any expenses or damages incurred by the purchaser except as expressly set forth herein, and in no event shall seller or manufacturer be liable for any special, incidental or consequential damages of any kind. This warranty does not supersede any statutory rights that may be available in certain countries. The foregoing manufacturer's warranty of shall be voided, and of no force and effect if buyer has modified or damaged the product.