The Ushio USH-350DP is a 350W super-high pressure mercury lamp.   This item is made by Ushio, but has alternative part numbers USH350DP, HSA350SB and 5000506.

Application

GCA/Cobilt wafer stepper using g-line (436nm) or i-line (365 nm) step and repeat exposure tools for silicon wafer lithography such as GCA 6300. 

Specifications

• Ushio P/N: 5000506,
• Wattage: 350 Watts,
• Nom. Voltage: 60 ±6 Volts,
• Current: 6 Amps,
• Burning Position: Vertical ±45°,
• Arc Gap (Cold): 2.8mm,
• Luminous Flux: 18,000(lm),
• Life Hrs (Typ.): 1,000 Hours, to 90% of initial.
  

• Super High Pressure Mercury Short Arc Spectrum

• Dimensions

Product Warning

Mercury Short Arc lamps emit harmful ULTRAVIOLET RADIATION, are under HIGH PRESSURE, require a HIGH VOLTAGE ignition, and can GENERATE OZONE (unless designated "OFR".) These lamps get VERY HOT during operation, and remain hot after operation for a significant time. Avoid direct or reflected exposure as this can cause serious skin burns and eye injury. This lamp should only be operated in properly designed and maintained equipment. Proper protective gear should be worn at any time the lamps are to be handled. Hg - LAMP CONTAINS MERCURY.