The Heraeus D6255-01J is a replacement deuterium lamp for the KLA-Tencor / Thermawave Opti-Probe thin film measurement systems. This deuterium lamp is made in Germany with a typical lifetime of 2000 hours.  

Applications

KLA - ThermaWave Series 3, Series 5, Opti-Probe 3290, SPFX100, FX200, F5X and several other Thermawave tools. 

Also known as:  

• Excelitas part number D6255-01J (replaces J90)

• Heraeus part number 80133979 (replacing 80078594)

• KLA/Thermawave p/n 29-013586

Specifications

• Spectral distribution: 185-400 nm, line free below 360 nm

• Light aperture size: 0.5 mm

• Envelope diameter: 30.0 mm

• Envelope material: UV-glass

• Ignition voltage: 400 V

• Operating voltage: max. 95.0/min. 75.0 Vdc

• Operating current: 320 mAdc

• Pre-heating: 10 Vdc

• Noise: ≤0.005 % p-p @ 250 nm

• Drift: 0.5 %/h @ 250 nm

• Typical Lifetime (to 50%): 2000 hrs

Also known as:  

• Excelitas part number D6255-01J (replaces J90) 

• Heraeus part number 80133979 (replacing 80078594)

• KLA/Thermawave p/n 29-013586

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